AZO Transparent Conductive Coating Line

AZO Transparent Conductive Coating Line

http://www.pvd-metallizer.com

Detailed Information:
The horizontal/vertical continuous magnetron sputtering AZO film coating production line has 7 vacuum chambers, Part 1 is the entrance chamber; part 2 is entrance buffering chamber; part 3 is the entrance transfer chamber, part 4 is the process chamber; part 5 is the exit transfer chamber; part 6 is the exit buffering chamber; part 7 is the exit chamber; Two pairs of mid-frequency dual Si target which is controlled by PUC04 closed loop ring form the high-quality SiO2 isolating layer; 10 pairs of column AZO target realize the high-quality AZO transparent conductive film; the dimension of processing in design is the plane base plate materials of 1100mm wide and 1400mm long. The cycle of production and processing can be optimized to 100-180 second. The production has the advanced design which uses the molecular pump to form the atmosphere separation by pumping. Also, it has used the turbo-molecular pump to get high-efficiency isolation, stable pumping speed and even distribution if air. 

1.Technical characteristic of production line 

A), Equipment type: horizontal/vertical continuous magnetron sputtering coating line. 

B), Dimension of carrier: designed according to the substrate of 1×1100mm×1400mm×3mm (can be customized according to requirements). 

C), Design requirements of film uniformity; in area of effective deposit, the uniformity of film thickness±5%. 

D), Cathode structure: adopt the mid-frequency dual rotary cathode. 

E), Driving mode; adopt the small vertial vehicle which is driven by double friction to load the carrier (vertical) or magnetic steering friction drive (horizontal). 

F), Realization of coating technology: adopt the ZnO : AL ceramic target and reactive sputtering deposit technology. 

G), Control system: the control system can realize the man-machine dialogue and carry out necessary intervention in production process. During operating process, there are alarm indication and error display; the alarm display can indicate the correct operation and troubleshooting for operators. 

H), Control of coating temperature: adopt the stainless sheathed heating device (can use the light tube to heat according to requirements of customers); the highest temperature is 350.Within the range from ambient temperature to 400,it can be designed according the any setting; the stability of control is ±5. 

I), Main technical parameters 
1), Final vacuum: 6×10E-4Pa 
2), Average production cycle: 80-180 seconds/frame. 
3), Carrier size: 1100×1400(mm) (can be customized on request). 
4), Film uniformity: ±5%.

China Guangdong PVD Metallizer Co.

Alex Li